Cubic BN films with a pure cubic phase upper layer were prepared by plasma-enhanced chemical vapor deposition. Infrared spectroscopy was applied to analyze the content of initial sp2-bonded BN layer in cubic BN thin films under compressive stress. It was found that the peak intensity near 1380cm1 attributed to the B–N stretching vibration of sp2-bonded BN was suppressed by the compressive stress in cubic BN films. The deviation between the measured and calculated peak intensities was found to be linear with the compressive stress when the upper layer of the film is a pure cubic phase layer.

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