n-Zn1xMgxOi-ZnOSiOxn+-Si heterostructured light-emitting diodes have been demonstrated by low-cost ultrasonic spray pyrolysis. The current-voltage measurement shows typical characteristics of a back-to-back diode due to the double Schottky barriers induced by the SiOx layer. Blue electroluminescence peaking at 460nm was observed at room temperature when a positive bias of 4V was applied on the Si substrate. The electroluminescence is suggested to be dominated by the donor-acceptor pair recombination in the i-ZnO layer, where the holes were injected from the valence band of Si into the acceptor level of i-ZnO.

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