We demonstrate a method for quantitatively probing the local low-frequency dielectric constant of thin insulating films by nanoscale capacitance microscopy. The calibrated capacitance-distance curves are measured on the dielectric film and analyzed by using a tip-sample capacitance model here proposed. Applied to SiO2 films as small as 1×1μm2 area and 2030nm thickness, the method gives a dielectric constant on the submicron scale in agreement with the value determined on the large scale. The observed precision is set by the capacitance noise level of the instrument and the tip radius.

1.
2.
H. G.
Tompkins
and
W. A.
McGahan
,
Spectroscopic Ellipsometry and Reflectometry: A User’s Guide
(
Wiley
,
New York
,
1998
), p.
6
.
3.
C.
Gao
and
X. D.
Xiang
,
Rev. Sci. Instrum.
69
,
3846
(
1998
).
4.
K.
Ohara
and
Y.
Cho
,
Jpn. J. Appl. Phys., Part 1
41
,
4961
(
2002
).
5.
E. V.
Russell
,
N. E.
Israeloff
,
L. E.
Walther
, and
H.
Alvarez Gomariz
,
Phys. Rev. Lett.
81
,
1461
(
1998
).
6.
T. S.
Gross
,
K. G.
Soucy
,
E.
Andideh
, and
K.
Chamberlin
,
J. Phys. D
35
,
723
(
2002
).
7.
A. V.
Krayev
and
R. V.
Talroze
,
Polymer
45
,
8195
(
2004
).
8.
D. T.
Lee
,
J. P.
Pelz
, and
B.
Bhushan
,
Rev. Sci. Instrum.
73
,
3525
(
2002
).
9.
L.
Fumagalli
,
G.
Ferrari
,
M.
Sampietro
,
I.
Casuso
,
E.
Martinez
,
J.
Samitier
, and
G.
Gomila
,
Nanotechnology
17
,
4581
(
2006
).
10.
L.
Fumagalli
,
I.
Casuso
,
G.
Ferrari
, and
G.
Gomila
,
Applied Scanning Probe Methods VIII
, edited by
B.
Bhushan
,
H.
Fuchs
, and
M.
Tomitori
(in press).
11.
I.
Casuso
,
L.
Fumagalli
,
E.
Padrós
, and
G.
Gomila
,
Appl. Phys. Lett.
91
,
063111
(
2007
).
12.
A.
Hudlet
,
M. Saint
Jean
,
C.
Guthmann
, and
J.
Berger
,
Eur. Phys. J. B
2
,
5
(
1998
).
13.
B. M.
Law
and
F.
Rieutord
,
Phys. Rev. B
66
,
035402
(
2002
).
14.
J.
Toset
,
I.
Casuso
,
J.
Samitier
, and
G.
Gomila
,
Nanotechnology
18
,
15503
(
2007
).
15.
I.
Horcas
,
R.
Fernández
,
J. M.
Gómez-Rodríguez
,
J.
Colchero
,
J.
Gómez-Herrero
, and
A. M.
Baró
,
Rev. Sci. Instrum.
78
,
013705
(
2007
).
16.
A.
Volinsky
,
J. B.
Vella
, and
W.
Gerberich
,
Thin Solid Films
429
,
201
(
2003
).
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