We report a cheap and scalable bottom-up technique for fabricating wafer-scale, subwavelength-structured antireflection coatings on single-crystalline silicon substrates. Spin-coated monolayer colloidal crystals are utilized as shadow masks to generate metallic nanohole arrays. Inverted pyramid arrays in silicon can then be templated against nanoholes by anisotropic wet etching. The resulting subwavelength gratings greatly suppress specular reflection at normal incidence. The reflection spectra for flat silicon and the templated gratings at long wavelengths agree well with the simulated results using a rigorous coupled wave analysis model. These subwavelength gratings are of great technological importance in crystalline silicon solar cells.
REFERENCES
1.
US Department of Energy Report of the Basic Energy Sciences Workshop on Solar Energy Utilization
, 18–21 April 2005
(unpublished).2.
Handbook of Photovoltaic Science and Engineering
, edited by A.
Luque
and S.
Hegedus
(Wiley
, West Sussex
, 2003
), p. 268
.3.
P.
Doshi
, G. E.
Jellison
, and A.
Rohatgi
, Appl. Opt.
36
, 7826
(1997
).4.
A.
Gombert
, W.
Glaubitt
, K.
Rose
, J.
Dreibholz
, B.
Blasi
, A.
Heinzel
, D.
Sporn
, W.
Doll
, and V.
Wittwer
, Thin Solid Films
351
, 73
(1999
).5.
B. G.
Prevo
, E. W.
Hon
, and O. D.
Velev
, J. Mater. Chem.
17
, 791
(2007
).6.
D. G.
Chen
, Sol. Energy Mater. Sol. Cells
68
, 313
(2001
).7.
P.
Lalanne
and G. M.
Morris
, Nanotechnology
8
, 53
(1997
).8.
S.
Chattopadhyay
, L. C.
Chen
, and K. H.
Chen
, Crit. Rev. Solid State Mater. Sci.
31
, 15
(2006
).9.
P. T.
Hammond
, Adv. Mater. (Weinheim, Ger.)
16
, 1271
(2004
).10.
J.
Hiller
, J. D.
Mendelsohn
, and M. F.
Rubner
, Nat. Mater.
1
, 59
(2002
).11.
M.
Ibn-Elhaj
and M.
Schadt
, Nature (London)
410
, 796
(2001
).12.
H. Y.
Koo
, D. K.
Yi
, S. J.
Yoo
, and D. Y.
Kim
, Adv. Mater. (Weinheim, Ger.)
16
, 274
(2004
).13.
B. G.
Prevo
, Y.
Hwang
, and O. D.
Velev
, Chem. Mater.
17
, 3642
(2005
).14.
S.
Walheim
, E.
Schaffer
, J.
Mlynek
, and U.
Steiner
, Science
283
, 520
(1999
).15.
Z. Z.
Wu
, J.
Walish
, A.
Nolte
, L.
Zhai
, R. E.
Cohen
, and M. F.
Rubner
, Adv. Mater. (Weinheim, Ger.)
18
, 2699
(2006
).16.
J. Q.
Xi
, M. F.
Schubert
, J. K.
Kim
, E. F.
Schubert
, M. F.
Chen
, S. Y.
Lin
, W.
Liu
, and J. A.
Smart
, Nat. Photonics
1
, 176
(2007
).17.
P. B.
Clapham
and M. C.
Hutley
, Nature (London)
244
, 281
(1973
).18.
D. G.
Stavenga
, S.
Foletti
, G.
Palasantzas
, and K.
Arikawa
, Proc. R. Soc. London, Ser. B
273
, 661
(2006
).19.
C.
Aydin
, A.
Zaslavsky
, G. J.
Sonek
, and J.
Goldstein
, Appl. Phys. Lett.
80
, 2242
(2002
).20.
21.
Y.
Kanamori
, K.
Hane
, H.
Sai
, and H.
Yugami
, Appl. Phys. Lett.
78
, 142
(2001
).22.
Y.
Kanamori
, E.
Roy
, and Y.
Chen
, Microelectron. Eng.
78-79
, 287
(2005
).23.
Y.
Kanamori
, M.
Sasaki
, and K.
Hane
, Opt. Lett.
24
, 1422
(1999
).24.
F.
Nikolajeff
, B.
Lofving
, M.
Johansson
, J.
Bengtsson
, S.
Hard
, and C.
Heine
, Appl. Opt.
39
, 4842
(2000
).25.
C. C.
Striemer
and P. M.
Fauchet
, Appl. Phys. Lett.
81
, 2980
(2002
).26.
S.
Wang
, X. Z.
Yu
, and H. T.
Fan
, Appl. Phys. Lett.
91
, 061105
(2007
).27.
C. T.
Wu
, F. H.
Ko
, and C. H.
Lin
, Appl. Phys. Lett.
90
, 171911
(2007
).28.
Z. N.
Yu
, H.
Gao
, W.
Wu
, H. X.
Ge
, and S. Y.
Chou
, J. Vac. Sci. Technol. B
21
, 2874
(2003
).29.
E. B.
Grann
, M. G.
Moharam
, and D. A.
Pommet
, J. Opt. Soc. Am. A
12
, 333
(1995
).30.
31.
32.
J.
Zhao
and M. A.
Green
, IEEE Trans. Electron Devices
38
, 1925
(1991
).33.
P.
Jiang
and M. J.
McFarland
, J. Am. Chem. Soc.
126
, 13778
(2004
).34.
P.
Jiang
, T.
Prasad
, M. J.
McFarland
, and V. L.
Colvin
, Appl. Phys. Lett.
89
, 011908
(2006
).35.
N. C.
Linn
, C. H.
Sun
, P.
Jiang
, and B.
Jiang
, Appl. Phys. Lett.
91
, 101108
(2007
).36.
P.
Jiang
and M. J.
McFarland
, J. Am. Chem. Soc.
127
, 3710
(2005
).37.
38.
P.
Jiang
, Langmuir
22
, 3955
(2006
).39.
J.
Henzie
, E. S.
Kwak
, and T. W.
Odom
, Nano Lett.
5
, 1199
(2005
).40.
41.
42.
M. G.
Moharam
, D. A.
Pommet
, E. B.
Grann
, and T. K.
Gaylord
, J. Opt. Soc. Am. A
12
, 1077
(1995
).43.
H. A.
Macleod
, Thin-Film Optical Filters
, 3rd ed. (Institute of Physics
, Bristol
, 2001
), p. 40
.44.
M. A.
Green
and M.
Keevers
, Prog. Photovoltaics
3
, 189
(1995
).© 2007 American Institute of Physics.
2007
American Institute of Physics
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