The authors present a Lorentz force based fusion magnetometer-accelerometer, which can detect simultaneously both geomagnetic field and acceleration. The sensor is fabricated on a silicon-on-glass wafer and packaged by silicon-gold eutectic bonding. When and are applied to the sensor, the fabricated magnetometer-accelerometer has a sensitivity of in magnetic field sensing and a sensitivity of in acceleration sensing. The sensor performance is sufficient for resolving approximately 10° in the orientation angle and it can function as an electronic compass in portable navigators that must be small and have low cost, and low power.
REFERENCES
1.
J.
Lenz
and A. S.
Edelstein
, IEEE Sens. J.
6
, 631
(2006
).2.
E.
Belly
, S. E.
Gilbert
, O.
Dezuari
, M.
Sancho
, and M. A. M.
Gijs
, Sens. Actuators, A
85
, 304
(2000
).3.
4.
R.
Gottfried-Gottfried
, W.
Budde
, R.
Jahne
, H.
Kuck
, B.
Sauer
, S.
Ulbricht
, and U.
Wende
, Sens. Actuators, A
54
, 443
(1996
).5.
P.
Kejik
, L.
Chiesi
, B.
Janossy
, and R. S.
Popovic
, Sens. Actuators, A
81
, 180
(2000
).6.
L.
Chiesi
, P.
Kejik
, B.
Janossy
, and R. S.
Popovic
, Sens. Actuators, A
82
, 174
(2000
).7.
H.
Gruger
and R.
Gottfried-Gottfried
, Sens. Actuators, A
91
, 61
(2001
).8.
R. B.
Givens
, J. C.
Murphy
, R.
Osiander
, T. J.
Kistenmacher
, and D. K.
Wickenden
, Appl. Phys. Lett.
69
, 2755
(1996
).9.
Z.
Kadar
, A.
Bossche
, P. M.
Sarro
, and J. R.
Mollinger
, Sens. Actuators, A
70
, 225
(1998
).10.
R. B.
Givens
, D. K.
Wickenden
, D. A.
Oursler
, R.
Osiander
, J. L.
Champion
, and T. J.
Kistenmacher
, Appl. Phys. Lett.
74
, 1472
(1999
).11.
H.
Emmerich
and M.
Schöfthaler
, IEEE Trans. Electron Devices
47
, 972
(2000
).12.
D. K.
Wickenden
, J. L.
Champion
, R.
Osiander
, R. B.
Givens
, J. L.
Lamb
, J. A.
Miragliotta
, D. A.
Oursler
, and T. J.
Kistenmachen
, Acta Astron.
52
, 421
(2003
).13.
W. T.
Thornson
, Theory of Vibration with Applications
(Prentice-Hall
, N.J., USA
, 1981
), p. 15
.14.
B.
Eyre
, K. S. J.
Pister
, and W.
Kaiser
, IEEE Electron Device Lett.
19
, 496
(1998
).© 2007 American Institute of Physics.
2007
American Institute of Physics
You do not currently have access to this content.