An atomic force microscope (AFM) cantilever based coordinate measuring probe applicable for true three dimensional measurements of microstructures is presented. The probe has a shaft glued to a commercial AFM cantilever and a probing sphere located at the free end of the shaft. A conventional optical lever method is applied to detect the bending, torsion, and the dynamic behavior of the AFM cantilever which will change dramatically when the probe sphere is in proximity to the object to be measured. The probe has advantages such as small probing force , high probing sensitivity allowing nanometer measurement resolution, easy exchange of probing elements, and low cost. Measurements of a microgear and a fuel injection nozzle using the developed probe are demonstrated, indicating its promising application potential.
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17 September 2007
Research Article|
September 20 2007
Atomic force microscope cantilever based microcoordinate measuring probe for true three-dimensional measurements of microstructures
Gaoliang Dai;
Gaoliang Dai
a)
Physikalisch-Technische Bundesanstalt
, Bundesallee 100, 38116 Braunschweig, Germany
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Helmut Wolff;
Helmut Wolff
Physikalisch-Technische Bundesanstalt
, Bundesallee 100, 38116 Braunschweig, Germany
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Hans-Ulrich Danzebrink
Hans-Ulrich Danzebrink
Physikalisch-Technische Bundesanstalt
, Bundesallee 100, 38116 Braunschweig, Germany
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a)
Author to whom correspondence should be addressed. Electronic mail: [email protected]
Appl. Phys. Lett. 91, 121912 (2007)
Article history
Received:
July 11 2007
Accepted:
August 30 2007
Citation
Gaoliang Dai, Helmut Wolff, Hans-Ulrich Danzebrink; Atomic force microscope cantilever based microcoordinate measuring probe for true three-dimensional measurements of microstructures. Appl. Phys. Lett. 17 September 2007; 91 (12): 121912. https://doi.org/10.1063/1.2786881
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