The formation of self-organized nanodot patterns on GaSb(001) targets by ion beam sputtering has been studied in situ with grazing incidence small angle x-ray scattering. The temporal evolution of the patterns at different ion energies has been monitored. The authors evidence a rapid coarsening in the characteristic wavelength until reaching a saturation value that scales with ion energy. The pattern evolves slower toward saturation for the lower ion energy while attaining a higher correlation length (normalized to the wavelength). The pattern time dependence is correlated with the influence of the sputtering rate on the pattern formation.
In situ x-ray scattering study of self-organized nanodot pattern formation on GaSb(001) by ion beam sputtering
O. Plantevin, R. Gago, L. Vázquez, A. Biermanns, T. H. Metzger; In situ x-ray scattering study of self-organized nanodot pattern formation on GaSb(001) by ion beam sputtering. Appl. Phys. Lett. 10 September 2007; 91 (11): 113105. https://doi.org/10.1063/1.2783964
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