The validity of the electron effective attenuation length database developed by National Institute of Standards and Technology (NIST) is examined for x-ray photoelectron spectroscopy (XPS) measurement of HfO2 (2.7nm)∕SiON (0.8nm)∕Si⁠. The angular dependences of photoelectron yields are calculated using the NIST database and composition depth profiles measured by high-resolution Rutherford backscattering spectroscopy. The calculated result reproduces the observed XPS result fairly well even at larger emission angles up to 80°, indicating that the accuracy of XPS depth profiling can be improved using the NIST database.

Topics
Thin films, Electromagnetic optics, Angular resolved X-ray photoelectron spectroscopy, Metal oxides, Chemical elements, Depth profiling techniques, Chemical compounds, Elastic scattering, Scattering theory
1.
K.
 
Kobayashi
,
M.
 
Yabashi
,
Y.
 
Takata
,
T.
 
Tokushima
,
S.
 
Shin
,
K.
 
Tamasaku
,
D.
 
Miwa
,
T.
 
Ishikawa
,
H.
 
Nohira
,
T.
 
Hattori
,
Y.
 
Sugita
,
O.
 
Nakatsuka
,
S.
 
Sakai
, and
S.
 
Zaima
,
Appl. Phys. Lett.
https://doi.org/10.1063/1.1595714
 
83
,
1005
(
2003
).
Google Scholar
Crossref
Search ADS
 
2.
C. J.
 
Powell
 and
A.
 
Jablonski
,
Surf. Interface Anal.
https://doi.org/10.1002/sia.1204
 
33
,
211
(
2002
).
Google Scholar
Crossref
Search ADS
 
3.
C. J.
 
Powell
 and
A.
 
Jablonski
, NIST Electron Effective Attenuation Length Database, Version 1.0,
National Institute of Standards and Technology
, Gaithersburg, MD,
2001
.
4.
I. S.
 
Tilinin
,
A.
 
Jablonski
,
J.
 
Zemek
, and
S.
 
Hucek
,
J. Electron Spectrosc. Relat. Phenom.
https://doi.org/10.1016/S0368-2048(97)00086-8
 
87
,
127
(
1997
).
Google Scholar
Crossref
Search ADS
 
5.
A.
 
Jablonski
 and
C. J.
 
Powell
,
Surf. Sci. Rep.
https://doi.org/10.1016/S0167-5729(02)00031-6
 
47
,
33
(
2002
).
Google Scholar
Crossref
Search ADS
 
6.
R. G.
 
Vitchev
,
Chr.
 
Defranoux
,
J.
 
Wolstenholme
,
T.
 
Conard
,
H.
 
Bender
, and
J. J.
 
Pireaux
,
J. Electron Spectrosc. Relat. Phenom.
 
149
,
37
(
2005
).
Google Scholar
Crossref
Search ADS
 
7.
S.
 
Tanuma
,
C. J.
 
Powell
, and
D. R.
 
Penn
,
Surf. Interface Anal.
https://doi.org/10.1002/sia.740210302
 
21
,
165
(
1994
).
Google Scholar
Crossref
Search ADS
 
8.
C. J.
 
Powell
,
W. S. M.
 
Werner
 and
W.
 
Smekal
,
Appl. Phys. Lett.
https://doi.org/10.1063/1.2363955
 
89
,
172101
(
2006
).
Google Scholar
Crossref
Search ADS
 
9.
W. S. M.
 
Werner
,
W.
 
Smekal
, and
C. J.
 
Powell
, NIST database for the simulation of electron spectra for surface analysis, SRD 100,
National Institute of Standards and Technology
, Geithersburg, MD,
2005
.
10.
K.
 
Kimura
,
S.
 
Joumori
,
Y.
 
Oota
,
K.
 
Nakajima
, and
M.
 
Suzuki
,
Nucl. Instrum. Methods Phys. Res. B
 
219&220
,
351
(
2004
).
Google Scholar
 
11.
S.
 
Tanuma
,
C. J.
 
Powell
, and
D. R.
 
Penn
,
Surf. Interface Anal.
https://doi.org/10.1002/(SICI)1096-9918(199701)25:1<25::AID-SIA207>3.3.CO;2-U
 
25
,
25
(
1997
).
Google Scholar
Crossref
Search ADS
 
© 2007 American Institute of Physics.
2007
American Institute of Physics
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