GaN Schottky barrier photodetectors with nucleation layer were fabricated. It was found that leakage current was much smaller and much less bias dependent for the photodetector with nucleation layer, as compared to the photodetector with conventional low-temperature GaN nucleation layer. It was also found that effective Schottky barrier height increased from with the insertion of the SiN layer. Furthermore, it was found that the authors can effectively suppress internal gain of the detector and enhance ultraviolet to visible rejection ratio by using the nucleation layer.
REFERENCES
1.
S.
Nakamura
, M.
Senoh
, S.
Nagahama
, N.
Iwasa
, T.
Yamada
, T.
Matsushita
, H.
Kiyoku
, Y.
Sugimuto
, T.
Kozaki
, H.
Umemoto
, M.
Sano
, and K.
Chocho
, Appl. Phys. Lett.
72
, 211
(1998
).2.
S. J.
Chang
, W. C.
Lai
, Y. K.
Su
, J. F.
Chen
, C. H.
Liu
, and U. H.
Liaw
, IEEE J. Sel. Top. Quantum Electron.
8
, 278
(2002
).3.
N.
Biyikli
, I.
Kimukin
, O.
Aytur
, and E.
Ozbay
, IEEE Photonics Technol. Lett.
16
, 1718
(2004
).4.
C. K.
Wang
, S. J.
Chang
, Y. K.
Su
, Y. Z.
Chiou
, S. C.
Chen
, C. S.
Chang
, T. K.
Lin
, H. L.
Liu
, and J. J.
Tang
, IEEE Trans. Electron Devices
53
, 38
(2006
).5.
O.
Katz
, V.
Garber
, B.
Meyler
, G.
Bahir
, and J.
Salzman
, Appl. Phys. Lett.
80
, 347
(2002
).6.
S. J.
Chang
, C. L.
Yu
, R. W.
Chuang
, P. C.
Chang
, Y. C.
Lin
, Y. W.
Jhan
, and C. H.
Chen
, IEEE Sens. J.
6
, 1043
(2006
).7.
E.
Monroy
, E.
Muňoz
, F. J.
Sánchez
, F.
Calley
, E.
Calleja
, B.
Beaumont
, P.
Gibart
, J. A.
Muňoz
, and F.
Cussó
, Semicond. Sci. Technol.
13
, 1042
(1998
).8.
G. Y.
Xu
, A.
Salvador
, W.
Kim
, Z.
Fan
, C.
Lu
, H.
Tang
, H.
Morkoç
, G.
Smith
, M.
Estes
, B.
Goldenberg
, W.
Yang
, and S.
Krishnankutty
, Appl. Phys. Lett.
71
, 2154
(1997
).9.
K.
Uchida
, K.
Nishida
, M.
Kondo
, and H.
Munekata
, J. Cryst. Growth
189-190
, 270
(1998
).10.
T.
Kachi
, K.
Tomita
, K.
Itoh
, and H.
Trando
, Appl. Phys. Lett.
72
, 704
(1998
).11.
S.
Sakai
, T.
Wang
, Y.
Morishima
, and Y.
Naoi
, J. Cryst. Growth
221
, 334
(2000
).12.
C. H.
Kuo
, S. J.
Chang
, Y. K.
Su
, C. K.
Wang
, L. W.
Wu
, J. K.
Sheu
, T. C.
Wen
, W. C.
Lai
, J. M.
Tsai
, and C. C.
Lin
, Solid-State Electron.
47
, 2019
(2003
).13.
S. J.
Chang
, C. S.
Chang
, Y. K.
Su
, R. W.
Chuang
, Y. C.
Lin
, S. C.
Shei
, H. M.
Lo
, H. H.Y.
Lin
, and J. C.
Ke
, IEEE J. Quantum Electron.
39
, 1439
(2003
).14.
S. J.
Chang
, L. W.
Wu
, Y. K.
Su
, Y. P.
Hsu
, W. C.
Lai
, J. M.
Tsai
, J. K.
Sheu
, and C. T.
Lee
, IEEE Photonics Technol. Lett.
16
, 1447
(2004
).15.
H.
Norde
, J. Appl. Phys.
50
, 5052
(1979
).16.
O.
Katz
, V.
Garber
, B.
Meyler
, G.
Bahir
, and J.
Salzman
, Appl. Phys. Lett.
79
, 1417
(2001
).17.
N.
Vanhove
, J.
John
, A.
Lorenz
, K.
Cheng
, G.
Borghs
, and J. E. M.
Haverkort
, Appl. Surf. Sci.
253
, 2930
(2006
).© 2007 American Institute of Physics.
2007
American Institute of Physics
You do not currently have access to this content.