The microstructures and magnetic properties of FePt films grown at 350°C on glass substrates with MgO (200) intermediate layer and CrRu (200) underlayer were investigated. The film with 1nm MgO intermediate layer showed higher degree of chemical ordering than that with 4nm MgO layer due to the compression of the lattice constant of 1nm MgO intermediate layer along the [100] direction. Isolated FePt particles were formed when nominal thickness of FePt was 4nm. The room temperature coercivity of isolated FePt particles with 1nm MgO intermediate layer was as high as 12kOe, significantly larger than that with 4nm MgO intermediate layer (6.3kOe).

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