The authors investigate the influence of a high temperature annealing in O2 atmosphere on the structural properties of ZnO substrates. Only at temperatures above 1100°C are atomic step heights and terraces seen by atomic force microscopy. The structural properties of the substrates were determined from the full width at half maximum (FWHM) of the rocking curve of the (0002) reflection. The FWHM is between 28 and 33arcsec for different substrates cut from one ingot but does not change with the annealing. The electrical properties, however, change from highly resistive to n-type conductive, which makes the substrates suitable for top-to-bottom contacting.

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