Epitaxial growth of (0001)-oriented BiFeO3 thin films on the (0001) surface of GaN has been realized using intervening epitaxial (111) SrTiO3(100)TiO2 buffer layers. The epitaxial BiFeO3 thin films have two in-plane orientations: [112¯0]BiFeO3[112¯0]GaN plus a twin variant related by a 180° in-plane rotation. BiFeO3 shows an out-of-plane remanent polarization of 90μCcm2, which is comparable to the remanent polarization of BiFeO3 prepared on (111) SrTiO3 single crystal substrates. The orientation of BiFeO3 realized on GaN provides the maximal out-of-plane polarization of BiFeO3, which is equivalent to a surface charge of 5×1014electronscm2.

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