The plasma absorption probe (PAP) was invented as an economical and robust diagnostic device to determine the electron density distribution in technical plasmas. It consists of a small antenna enclosed by a dielectric tube which is immersed in the plasma. A network analyzer feeds a rf signal to the antenna and displays the frequency dependence of the power absorption. From the absorption spectrum the value of the electron density is calculated. The original evaluation formula was based on the dispersion relation of plasma surface waves propagating along an infinite dielectric cylinder. In this letter the authors present the analysis of a less idealized configuration. The calculated spectra are in good qualitative agreement with their experimental counterparts, but differ considerably from those predicted by the surface wave ansatz. An evaluation scheme which takes our findings into account will improve the performance of the PAP technique further.
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19 March 2007
Research Article|
March 23 2007
Modeling and simulation of the plasma absorption probe
M. Lapke;
M. Lapke
Institute for Theoretical Electrical Engineering, Center for Plasma Science and Technology,
Ruhr University Bochum
, D-44780 Bochum, Germany
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T. Mussenbrock;
T. Mussenbrock
Institute for Theoretical Electrical Engineering, Center for Plasma Science and Technology,
Ruhr University Bochum
, D-44780 Bochum, Germany
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R. P. Brinkmann;
R. P. Brinkmann
a)
Institute for Theoretical Electrical Engineering, Center for Plasma Science and Technology,
Ruhr University Bochum
, D-44780 Bochum, Germany
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C. Scharwitz;
C. Scharwitz
Institute for Experimental Physics II, Applied Plasma Physics, Center for Plasma Science and Technology,
Ruhr University Bochum
, D-44780 Bochum, Germany
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M. Böke;
M. Böke
Institute for Experimental Physics II, Applied Plasma Physics, Center for Plasma Science and Technology,
Ruhr University Bochum
, D-44780 Bochum, Germany
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J. Winter
J. Winter
Institute for Experimental Physics II, Applied Plasma Physics, Center for Plasma Science and Technology,
Ruhr University Bochum
, D-44780 Bochum, Germany
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a)
Electronic mail: brinkmann@tet.rub.de
Appl. Phys. Lett. 90, 121502 (2007)
Article history
Received:
January 18 2007
Accepted:
February 11 2007
Citation
M. Lapke, T. Mussenbrock, R. P. Brinkmann, C. Scharwitz, M. Böke, J. Winter; Modeling and simulation of the plasma absorption probe. Appl. Phys. Lett. 19 March 2007; 90 (12): 121502. https://doi.org/10.1063/1.2714202
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