Electron energy barriers at the interfaces of GaAs(100) with appear to be insensitive to the Fermi level pinning indicating that charges at interface states are of marginal importance for the band alignment at semiconductor/insulator interfaces. The inferred conduction band offset of for is close to that measured at the interface which is consistent with the 5.8 and wide band gaps of these two insulators. However, the defects revealed by photoionization measurements exhibit a distinctly different in-depth distribution. In most of the traps are located close to the semiconductor surface, while in case they are found distributed across the entire oxide layer.
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