Three-dimensional (3D) profiles of single nanotracks generated by a low impact density of Cl ions at have been determined by optical methods, using an effective-medium approach. The buried location of the maximum stopping power induces a surface optical waveguiding layer even at ultralow fluences that allows to obtain the effective refractive index profiles (from dark-mode measurements). Combining the optical information with Rutherford backscattering spectroscopy/channeling experiments, the existence of a surrounding defective halo around the amorphous track core has been ascertained. The 3D profile of the halo has also been determined.
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