A vertical AlGaN deep ultraviolet (DUV) light emitting diode (LED) emitting at 322nm was fabfricated by the laser lift-off technique. The emission area extended to the entire electrode uniformly, and the current crowding was suppressed effectively in the devices. As a result, the differential conductance of the vertical LED was improved by a factor of 5 and the operation voltage was reduced to half, compared to that of the lateral LED. The self-heating effect was effectively suppressed even at high-current-density operation. The vertical structure in the high resistive AlGaN LED has potential application in high-power AlGaN DUV devices.

1.
D.
Morita
,
M.
Sano
,
M.
Yamamoto
,
T. I.
Murayama
,
S.
Nagahama
, and
T.
Mukai
,
Jpn. J. Appl. Phys., Part 2
41
,
L1434
(
2002
).
2.
Y.
Taniyasu
,
M.
Kasu
, and
T.
Makimoto
,
Nature (London)
441
,
325
(
2006
).
3.
A. J.
Fischer
,
A. A.
Allerman
,
M. H.
Crawford
,
K. H. A.
Bogart
,
S. R.
Lee
,
R. J.
Kaplar
,
W. W.
Chow
,
S. R.
Kurtz
,
K. W.
Fullmer
, and
J. J.
Figiel
,
Appl. Phys. Lett.
84
,
3394
(
2004
).
4.
A. A.
Allerman
,
M. H.
Crawford
,
A. J.
Fischer
,
K. H. A.
Bogart
,
S. R.
Lee
,
D. M.
Follstaedt
,
P. P.
Provencio
, and
D. D.
Koleske
,
J. Cryst. Growth
272
,
227
(
2004
).
5.
V.
Adivarahan
,
W. H.
Sun
,
A.
Chitnis
,
M.
Shatalov
,
S.
Wu
,
H. P.
Maruska
, and
M. A.
Khan
,
Appl. Phys. Lett.
85
,
2175
(
2004
).
6.
J.
Edmond
,
A.
Abare
,
M.
Bergman
,
J.
Bharathan
,
K. L.
Bunker
,
D.
Emerson
,
K.
Haberern
,
J.
Ibbetson
,
Mi.
Leung
,
P.
Russel
, and
D.
Slater
,
J. Cryst. Growth
272
,
242
(
2004
).
7.
K.
Mayes
,
A.
Yasan
,
R.
McClintock
,
D.
Shiell
,
S. R.
Darvish
,
P.
Kung
, and
M.
Razeghi
,
Appl. Phys. Lett.
84
,
1046
(
2004
).
8.
A.
Chitnis
,
J. P.
Zhang
,
V.
Adivarahan
,
M.
Shatalov
,
S.
Wu
,
R.
Pachipulusu
,
V.
Mandavilli
, and
M. A.
Khan
,
Appl. Phys. Lett.
82
,
2565
(
2003
).
9.
J. P.
Zhang
,
S.
Wu
,
S.
Rai
,
V.
Mandavilli
,
V.
Adivarahan
,
A.
Chitnis
,
M.
Shatalov
, and
M. A.
Khan
,
Appl. Phys. Lett.
83
,
3456
(
2003
).
10.
A.
Chitnis
,
J.
Sun
,
V.
Mandavilli
,
R.
Pachipulusu
,
S.
Wu
,
M.
Gaevski
,
V.
Adivarahan
,
J. P.
Zhang
, and
M. A.
Khan
,
Appl. Phys. Lett.
81
,
3491
(
2002
).
11.
H. W.
Choi
and
M. D.
Dawson
,
Appl. Phys. Lett.
86
,
053504
(
2005
).
12.
M.
Shatalov
,
G.
Simin
,
V.
Adivarahan
,
A.
Chitnis
,
S.
Wu
,
R.
Pachipulusu
,
V.
Mandavilli
,
K.
Simin
,
J. P.
Zhang
,
J. W.
Yang
, and
M. A.
Khan
,
Jpn. J. Appl. Phys., Part 1
41
,
5083
(
2002
).
13.
V.
Adivarahan
,
S.
Wu
,
W. H.
Sun
,
V.
Mandavilli
,
M. S.
Shatalov
,
G.
Simin
,
J. W.
Yang
,
H. P.
Maruska
, and
M. A.
Khan
,
Appl. Phys. Lett.
85
,
1838
(
2004
).
14.
D.
Morita
,
M.
Sano
,
M.
Yamamoto
,
T.
Murayama
,
S.
Nagahama
, and
T.
Mukai
,
Jpn. J. Appl. Phys., Part 2
41
,
L1434
(
2002
).
15.
T.
Ueda
,
M.
Ishida
,
S.
Tamura
,
Y.
Fujimoto
,
M.
Yuri
,
T.
Saito
, and
D.
Ueda
,
Phys. Status Solidi C
0
,
2219
(
2003
).
16.
B. S.
Tan
,
S.
Yuan
, and
X. J.
Kang
,
Appl. Phys. Lett.
84
,
2757
(
2004
).
17.
D. W.
Kim
,
H. Y.
Lee
,
M. C.
Yoo
, and
G. Y.
Yeom
,
Appl. Phys. Lett.
86
,
052108
(
2005
).
18.
W. S.
Wong
,
T.
Sands
,
N. W.
Cheung
,
M.
Kneissl
,
D. P.
Bour
,
P.
Mei
,
L. T.
Romano
, and
N. M.
Johnson
,
Appl. Phys. Lett.
77
,
2822
(
2000
).
19.
C.-F.
Chu
,
F.-I.
Lai
,
J.-T.
Chu
,
C.-C.
Yu
,
C.-F.
Lin
,
H.-C.
Kuo
, and
S. C.
Wang
,
J. Appl. Phys.
95
,
3916
(
2004
).
20.
J. K.
Kim
,
J.-L.
Lee
,
J. W.
Lee
,
H. E.
Shin
,
Y. J.
Park
, and
T.
Kim
,
Appl. Phys. Lett.
73
,
2953
(
1998
).
You do not currently have access to this content.