The present work proposes an extension of Oliver-Pharr analysis [J. Mater. Res.7, 1564 (1992)] of unloading force-displacement data obtained in nanoscale indentation experiments to account for contact adhesion. The loading force is considered a sum of the contact elastic and adhesion forces. During the unloading, both forces suffer variations. For conical geometry, the unloading force-displacement curve is described by a sum of a quadratic term (accounting for the elastic force) and a linear term (accounting for adhesive force). Results of atomic force microscopy indentation experiments performed with sharpened silicon tips on poly(dimethylsiloxane) agreed well with the prediction of the proposed theoretical model.

1.
Y.-G.
Jung
,
B. R.
Lawn
,
M.
Martyniuk
,
H.
Huang
, and
X. Z.
Hu
,
J. Mater. Res.
19
,
3076
(
2004
).
2.
J. V.
Fernandes
,
A. C.
Trindade
,
L. F.
Menezes
, and
A.
Cavaleiro
,
Surf. Coat. Technol.
131
,
457
(
2000
).
3.
K.
Miyahara
,
N.
Nagashima
,
T.
Ohmura
, and
S.
Matsuoka
,
Nanostruct. Mater.
12
,
1049
(
1999
).
4.
A.
Touhami
,
B.
Nysten
, and
Y. F.
Dufrene
,
Langmuir
19
,
4539
(
2003
).
5.
Y.
Rabinovich
,
M.
Esayanur
,
S.
Daosukho
,
K.
Byer
,
H.
El-Shall
, and
S.
Khan
,
J. Colloid Interface Sci.
285
,
125
(
2005
).
6.
V. V.
Pokropivnyy
,
V. V.
Skorokhod
, and
A. V.
Pokropivny
,
Modell. Simul. Mater. Sci. Eng.
5
,
579
(
1997
).
7.
I. P.
Zhao
,
X.
Shi
, and
W. J.
Li
,
Rev. Adv. Mater. Sci.
5
,
348
(
2003
);
M. R.
VanLandingham
,
J. S.
Villarrubia
,
W. F.
Guthrie
, and
G. F.
Meyers
, in
Nanoindentation of Polymers: An Overview
,
Proceedings of the Macromolecular Symposia
, edited by
V. V.
Tsukruk
and
N. D.
Spencer
(
Wiley-VCH
, GmbH,
2001
), pp.
15
43
.
8.
W. C.
Oliver
and
G. M.
Pharr
,
J. Mater. Res.
7
,
1564
(
1992
).
9.
I. N.
Sneddon
,
Int. J. Eng. Sci.
3
,
47
(
1965
).
10.
G. M.
Pharr
,
W. C.
Oliver
, and
F. R.
Brotzen
,
J. Mater. Res.
7
,
613
(
1992
).
11.
N. A.
Stillwell
and
D.
Tabor
,
Proc. Phys. Soc. London
78
,
169
(
1961
).
12.
M. F.
Doerner
and
W. D.
Nix
,
J. Mater. Res.
1
,
601
(
1986
).
13.
D.
Armani
,
C.
Liu
, and
N. R.
Aluru
,
Proceedings of the IEEE Microelectromechanical Systems (MEMS)
,
1999
, p.
222
.
14.
R. J.
Cannara
,
M. J.
Brukman
, and
R. W.
Carpick
,
Rev. Sci. Instrum.
76
,
053706
(
2005
).
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