Sputter deposition of gold (Au) onto ionic liquids (ILs) resulted in the formation of highly dispersed Au nanoparticles without additional chemical species, such as reducing and∕or stabilizing agents. The Au nanoparticles in 1-ethyl-3-methylimidazolium tetrafluoroborate had an average diameter (dav) of 5.5nm with a standard deviation (σ) of 0.86nm, while sputter deposition onto N,N,N-trimethyl-N-propylammonium bis(trifluoromethanesulfonyl)imide resulted in the formation of much smaller Au nanoparticles with dav of 1.9nm and σ of 0.46nm. Prolongation of sputtering time results in a higher concentration of Au nanoparticles in ILs, but did not cause a remarkable change in their size.

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