Fatigue is investigated in epitaxial films grown on substrates with Pt or (SRO) top electrodes. It was experimentally determined that fatigue occurs irrespective of whether the top electrode is Pt or SRO. The fatigue behavior is strongly dependent on the frequency. A polarization recovery was observed for both types of top electrodes, but the recovery is almost complete for a SRO top electrode and only about 40% from the initial polarization value for Pt top electrodes. The results are tentatively explained by the frequency response of the deep traps and by migration of oxygen vacancies.
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