This work presents a model to predict the effect of surface stresses on the -mode bending resonant frequency of microcantilevers and its experimental validation. With this model, one can calculate the surface stress acting upon the microcantilever solely by measuring resonant frequencies whereas previously one needed to measure the deflection. Resonant frequency measurement has distinct advantages in terms of ease and accuracy of measurement.
REFERENCES
1.
R.
Berger
, C.
Gerber
, J. K.
Gimzewski
, E.
Meyer
, and H. J.
Güntherodt
, Appl. Phys. Lett.
69
, 40
(1996
).2.
S.
Cherian
and T.
Thundat
, Appl. Phys. Lett.
80
, 2219
(2002
).3.
G. Y.
Chen
, T.
Thundat
, E. A.
Wachter
, and R. J.
Warmack
, J. Appl. Phys.
77
, 3618
(1995
).4.
J. H.
Lee
, T. S.
Kim
, and K. H.
Yoon
, Appl. Phys. Lett.
84
, 3187
(2004
).5.
6.
P.
Müller
and R.
Kern
, Surf. Sci.
301
, 386
(1994
).7.
8.
J.
Martin
, W.
Bacher
, O. F.
Hagena
, and W. K.
Schomburg
, in Proceedings of the 11th Annual International Workshop on Micro Electro Mechanical Systems
, MEMS 98, Heidelberg, Germany, 25–29 January 1998
(IEEE
, New York, 1998).9.
A. W.
McFarland
, Ph.D. thesis, Georgia Institute of Technology
, 2004
.10.
S. P.
Timoshenko
, D. H.
Young
, and W.
Weaver
, Vibration Problems in Engineering
, 4th ed. (Wiley
, New York, 1974
), pp. 416
–420
.11.
M. K.
Baller
, Ph.D. thesis, University of Basel
(2001
).12.
J. E.
Sader
, J. Appl. Phys.
89
, 2911
(2001
).13.
C. D.
Bain
, J.
Evall
, and G. M.
Whitesides
, J. Am. Chem. Soc.
111
, 7155
(1989
).14.
C. D.
Bain
, E. B.
Troughton
, Y. T.
Tao
, J.
Evall
, G. M.
Whitesides
, and R. G.
Nuzzo
, J. Am. Chem. Soc.
111
, 321
(1989
).15.
C. D.
Bain
and G. M.
Whitesides
, J. Am. Chem. Soc.
111
, 7164
(1989
).16.
U. S.
Lindholm
, D. D.
Kana
, W. H.
Chu
, and H. N.
Abramson
, J. Ship Res.
9
, 11
(1965
).17.
J. E.
Sader
, I.
Larson
, P.
Mulvaney
, and L. R.
White
, Rev. Sci. Instrum.
66
, 3789
(1995
).18.
A. J.
Ricco
, A. W.
Staton
, R. M.
Crooks
, and T.
Kim
, Faraday Discuss.
107
, 247
(1997
).19.
A.-R. A.
Khaled
, K.
Vafai
, M.
Yang
, X.
Zhang
, and C.
Ozkan
, Sens. Actuators B
94
, 103
(2003
).© 2005 American Institute of Physics.
2005
American Institute of Physics
You do not currently have access to this content.
