Single-phase vanadium dioxide thin films have been grown on substrates by means of a well-controlled magnetron sputtering process. The deposited films were found to exhibit a semiconductor-to-metal transition (SMT) at with a resistivity change as high as 3.2 decades. A direct and clear-cut correlation is established between the SMT characteristics (both amplitude and abruptness of the transition) of the films and their crystallite size.
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