Highly efficient microcrystalline silicon solar cells deposited from a pure $SiH4$ flow Available to Purchase

A time-resolved optical emission spectroscopic study identified transient behavior of the excited SiH emission in a parallel plate $SiH4∕H2$ plasma. The transient behavior could be prevented by filling the background gas with $H2$ prior to plasma ignition. Applying this condition, state-of-the-art microcrystalline silicon $(μc-Si:H)$ could be deposited irrespective of the applied $H2$ flow, ultimately demonstrated by a 9.5% efficient solar cell deposited from pure $SiH4$⁠. The results are discussed in terms of $SiH4$ back diffusion: an initial diffusion flux of $SiH4$ from the reactor’s dead volume back into the plasma.