Carrier concentration, mobility, and electron effective mass in chlorine-doped $n$-type $Zn1−xMnxSe$ epilayers grown by molecular-beam epitaxy

We investigate $n$-type chlorine-doped ZnMnSe epilayers with various Mn contents and doping concentrations. In ZnSe, the maximum dopability was $6×1019cm−3$⁠, which reduces to $1.1×1019cm−3$ at 13% Mn content. At a constant $ZnCl2$ doping source temperature, the doping concentration decreases continuously with increasing Mn content in the sample. From our optical measurements, we found a lower electron effective mass in $Zn0.87Mn0.13Se$ samples compared to ZnSe. Additionally, the incorporation of Mn increases the resistivity and decreases the mobility of the free charge carriers in the samples.