Epitaxial n-type ZnO films grown by a laser molecular-beam epitaxy method were investigated by the temperature-dependent Hall-effect technique. The 300K carrier concentration and mobility were about ns1016cm3 and 440cm2Vs, respectively. Transport characteristics are calculated by solving the Boltzmann transport equation using a variational method. Mobility limit of 430cm2Vs was calculated at 300K. The temperature dependence of the mobility for an undoped film is calculated and agrees favorably well with experimental data if physical parameters are chosen so as to approach those. In the experimental “mobility versus concentration” curve, unusual phenomenon was observed, i.e., mobilities at ns5×1018cm3 are significantly smaller than those at higher densities above 1020cm3. It is qualitatively explained in terms of electron-plasmon interaction.

1.
A.
Tsukazaki
,
A.
Ohtomo
,
T.
Onuma
,
M.
Ohtani
,
T.
Makino
,
M.
Sumiya
,
K.
Ohtani
,
S. F.
Chichibu
,
S.
Fuke
,
Y.
Segawa
,
H.
Koinuma
, and
M.
Kawasaki
,
Nat. Mater.
4
,
42
(
2005
).
2.
A.
Tsukazaki
,
A.
Ohtomo
,
M.
Kawasaki
,
C. H.
Chia
,
T.
Makino
,
Y.
Segawa
,
T.
Koida
,
S.
Chichibu
, and
H.
Koinuma
,
Appl. Phys. Lett.
83
,
2784
(
2003
).
3.
K.
Miyamoto
,
M.
Sano
,
H.
Kato
, and
T.
Yao
,
Jpn. J. Appl. Phys., Part 2
41
,
L1203
(
2002
).
5.
D. S.
Ginley
and
C.
Bright
,
Mater. Res. Bull.
25
,
15
(
2000
).
6.
H.
Kato
,
M.
Sano
,
K.
Miyamoto
, and
T.
Yao
,
Jpn. J. Appl. Phys., Part 1
42
,
2241
(
2003
).
7.
K.
Iwata
,
P.
Fons
,
S.
Niki
,
A.
Yamada
,
K.
Matsubara
,
K.
Nakahara
, and
H.
Takasu
,
Phys. Status Solidi A
180
,
287
(
2000
).
8.
E. M.
Kaidashev
,
M.
Lorenz
,
H.
von Wenckstern
,
A.
Rahm
,
H.-C.
Semmelhack
,
K.-H.
Han
,
G.
Benndorf
,
C.
Bundesmann
,
H.
Hochmuth
, and
M.
Grundmann
,
Appl. Phys. Lett.
82
,
3901
(
2003
).
9.
D. C.
Look
,
J. W.
Hemsky
, and
J. R.
Sizelove
,
Phys. Rev. Lett.
82
,
2552
(
1999
).
10.
D. C.
Look
,
D. C.
Reynolds
,
J. R.
Sizelove
,
R. L.
Jones
,
C. W.
Litton
,
G.
Cantwell
, and
W. C.
Harsch
,
Solid State Commun.
105
,
399
(
1998
).
11.
D. L.
Rode
,
Semicond. Semimetals
10
,
1
(
1975
).
12.
J. D.
Albrecht
,
P. P.
Ruden
,
S.
Limpijumnong
,
W. R. L.
Lambrecht
, and
K. F.
Brennan
,
J. Appl. Phys.
86
,
6864
(
1999
).
13.
M. V.
Fischetti
,
Phys. Rev. B
44
,
5527
(
1991
).
14.
J. R.
Lowney
and
H. S.
Bennett
,
J. Appl. Phys.
69
,
7102
(
1991
).
15.
K.
Seeger
,
Semiconductor Physics: An Introduction
, 8th ed. (
Springer
, Berlin,
2002
).
16.
E.
Mollwo
, in
Semiconductors: Physics of II-VI and I-VII Compounds, Semimagnetic Semiconductors
,
Landolt-Börnstein New Series Vol. 17
, edited by
O.
Madelung
,
M.
Schulz
, and
H.
Weiss
(
Springer
, Berlin,
1982
), p.
35
.
17.
H. E.
Ruda
and
B.
Lai
,
J. Appl. Phys.
68
,
1714
(
1990
).
18.
A.
Ohtomo
and
A.
Tsukazaki
,
Semicond. Sci. Technol.
20
,
51
(
2005
).
19.
T.
Makino
,
Y.
Segawa
,
M.
Kawasaki
, and
H.
Koinuma
,
Semicond. Sci. Technol.
20
,
578
(
2005
).
20.
D. C.
Look
and
R. J.
Molnar
,
Appl. Phys. Lett.
70
,
3377
(
1997
).
21.
T.
Makino
,
Y.
Segawa
,
A.
Tsukazaki
,
A.
Ohtomo
,
S.
Yoshida
, and
M.
Kawasaki
,
Appl. Phys. Lett.
85
,
759
(
2004
).
22.
T.
Makino
,
C. H.
Chia
,
Y.
Segawa
,
A.
Ohtomo
,
K.
Tamura
,
M.
Kawasaki
, and
H.
Koinuma
,
Phys. Status Solidi B
299
,
853
(
2002
).
23.
T.
Makino
,
K.
Tamura
,
C. H.
Chia
,
Y.
Segawa
,
M.
Kawasaki
,
A.
Ohtomo
, and
H.
Koinuma
,
Phys. Rev. B
65
,
121201
(R) (
2002
).
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