Au Schottky contacts on cleaved quantum wells (QWs) were used as precise nanometer-scale apertures to quantify the spatial resolution of ballistic electron emission microscopy (BEEM). Both the amplitude and width of the measured average BEEM current profiles showed systematic dependencies on the QW width and Au film thickness, indicating surprisingly large BEEM resolutions of , , and for Au film thicknesses of 4, 7, and , respectively, but roughly independent of Au grain size. These measurements are consistent with theoretical models that include multiple hot-electron scattering at interfaces and in the bulk of the metal film.
REFERENCES
1.
2.
V.
Narayanamurti
and M.
Kozhevnikov
, Phys. Rep.
349
, 447
(2001
).3.
D. L.
Smith
, E. Y.
Lee
, and V.
Narayanamurti
, Phys. Rev. Lett.
80
, 2433
(1998
).4.
A. A.
Talin
, R. S.
Williams
, B. A.
Morgan
, K. M.
Ring
, and K. L.
Kavanaugh
, Phys. Rev. B
49
, 16474
(1994
).5.
H.
Palm
, M.
Arbes
, and M.
Schulz
, Phys. Rev. Lett.
71
, 2224
(1993
).6.
A. M.
Milliken
, S. J.
Manion
, W. J.
Kaiser
, L. D.
Bell
, and M. H.
Hecht
, Phys. Rev. B
46
, 12826
(1992
).7.
A.
Davies
, J. G.
Couillard
, and H. G.
Craighead
, Appl. Phys. Lett.
61
, 1040
(1992
).8.
H.
Sirringhaus
, E. Y.
Lee
, and H.
von Kanel
, Phys. Rev. Lett.
74
, 3999
(1995
).9.
C.
Manke
, Y.
Bodschwinna
, and M.
Schulz
, Appl. Surf. Sci.
117/118
, 321
(1997
).10.
L. J.
Schowalter
and E. Y.
Lee
, Phys. Rev. B
43
, 9308
(1991
).11.
M.-L.
Ke
, R. H.
Williams
, D. I.
Westwood
, and B. E.
Richardson
, Microelectron. Eng.
31
, 195
(1996
).12.
J. P.
Pelz
and R. H.
Koch
, Phys. Rev. B
41
, 1212
(1990
).13.
C.
Tivarus
, J. P.
Pelz
, M. K.
Hudait
, and S. A.
Ringel
, Phys. Rev. Lett.
94
, 206803
(2005
).14.
D.
Rakoczy
, G.
Strasser
, and J.
Smoliner
, Appl. Phys. Lett.
86
, 202112
(2005
).15.
Y.
Ding
, K. B.
Park
, J. P.
Pelz
, K. C.
Palle
, M. K.
Mikhov
, B. J.
Skromme
, H.
Meidia
, and S.
Mahajan
, Phys. Rev. B
69
, 041305
(2004
).16.
C.
Tivarus
, J. P.
Pelz
, M. K.
Hudait
, and S. A.
Ringel
, Proceedings of the 2005 International Conference on Characterization and Metrology for ULSI Technology
, March 2005
(unpublished).17.
F. J.
Garcia-Vidal
, P. L.
de Andres
, and F.
Flores
, Phys. Rev. Lett.
76
, 807
(1996
).© 2005 American Institute of Physics.
2005
American Institute of Physics
You do not currently have access to this content.
