We studied discharge characteristics of microwave plasmas excited with a large-area planar microwave launcher installed internally in a 600-mm-diam cylindrical vacuum chamber. With the microwave power less than roughly 400W, we demonstrated the large volumetric volume-wave plasma (VWP) spread in the entire chamber at a pressure of 1427Pa in He. Above 400W, the plasma discharge made a sudden transition to higher-density, uniform surface-wave plasma (SWP) having a spatial uniformity of ±3.5% over 300mm in diameter. Electron energy probability functions in the downstream region were studied using Langmuir probe measurements with Druyvesteyn method in both the SWP and VWP discharges.

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