We studied discharge characteristics of microwave plasmas excited with a large-area planar microwave launcher installed internally in a -diam cylindrical vacuum chamber. With the microwave power less than roughly , we demonstrated the large volumetric volume-wave plasma (VWP) spread in the entire chamber at a pressure of in He. Above , the plasma discharge made a sudden transition to higher-density, uniform surface-wave plasma (SWP) having a spatial uniformity of over in diameter. Electron energy probability functions in the downstream region were studied using Langmuir probe measurements with Druyvesteyn method in both the SWP and VWP discharges.
Characteristics of surface-wave and volume-wave plasmas produced with internally mounted large-area planar microwave launcher
Masaaki Nagatsu, Katsutoshi Naito, Akihisa Ogino, Keigo Ninomiya, Shohei Nanko; Characteristics of surface-wave and volume-wave plasmas produced with internally mounted large-area planar microwave launcher. Appl. Phys. Lett. 17 October 2005; 87 (16): 161501. https://doi.org/10.1063/1.2108119
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