A subregional slicing method (SSM) is proposed to increase the nanofabrication efficiency of a nanostereolithography (NSL) process based on two-photon polymerization (TPP). The NSL process can be used to fabricate three-dimensional (3D) microstructures via the accumulation of layers of uniform thickness; hence, the precision of the final 3D microstructure depends on the layer thickness. The use of a uniform layer thickness means that, to fabricate a precise microstructure, a large number of thin slices is inevitably required, leading to long processing times. In the SSM proposed here, however, the 3D microstructure is divided into several subregions on the basis of the geometric slope, and then each of these subregions is uniformly sliced with a layer thickness determined by the geometric slope characteristics of each subregion. Subregions with gentle slopes are sliced with thin layer thicknesses, whereas subregions with steep slopes are sliced with thick layer thicknesses. Here, we describe the procedure of the SSM based on TPP, and discuss the fabrication efficiency of the method through the fabrication of a 3D microstructure.
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10 October 2005
Research Article|
October 07 2005
Subregional slicing method to increase three-dimensional nanofabrication efficiency in two-photon polymerization Available to Purchase
Sang Hu Park;
Sang Hu Park
Department of Mechanical Engineering,
Korea Advanced Institute of Science and Technology
, Daejeon 305-701, Korea
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Sang Ho Lee;
Sang Ho Lee
a)
Department of Mechanical Engineering,
Korea Advanced Institute of Science and Technology
, Daejeon 305-701, Korea
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Dong-Yol Yang;
Dong-Yol Yang
b)
Department of Mechanical Engineering,
Korea Advanced Institute of Science and Technology
, Daejeon 305-701, Korea
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Hong Jin Kong;
Hong Jin Kong
Department of Physics,
Korea Advanced Institute of Science and Technology
, Daejeon 305-701, Korea
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Kwang-Sup Lee
Kwang-Sup Lee
Department of Polymer Science and Engineering,
Hannam University
, Daejeon 306-791, Korea
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Sang Hu Park
Department of Mechanical Engineering,
Korea Advanced Institute of Science and Technology
, Daejeon 305-701, Korea
Sang Ho Lee
a)
Department of Mechanical Engineering,
Korea Advanced Institute of Science and Technology
, Daejeon 305-701, Korea
Dong-Yol Yang
b)
Department of Mechanical Engineering,
Korea Advanced Institute of Science and Technology
, Daejeon 305-701, Korea
Hong Jin Kong
Department of Physics,
Korea Advanced Institute of Science and Technology
, Daejeon 305-701, Korea
Kwang-Sup Lee
Department of Polymer Science and Engineering,
Hannam University
, Daejeon 306-791, Koreaa)
Present address: LG-PRC, LG Electronics, Jinwi-myeon, Pyeongtaek-si, Gyeonggi-do 451-713, Korea.
b)
Author to whom correspondence should be addressed; electronic mail: [email protected]
Appl. Phys. Lett. 87, 154108 (2005)
Article history
Received:
June 01 2005
Accepted:
August 23 2005
Citation
Sang Hu Park, Sang Ho Lee, Dong-Yol Yang, Hong Jin Kong, Kwang-Sup Lee; Subregional slicing method to increase three-dimensional nanofabrication efficiency in two-photon polymerization. Appl. Phys. Lett. 10 October 2005; 87 (15): 154108. https://doi.org/10.1063/1.2103393
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