Metal-oxide-semiconductor field-effect-transistors using atomic-layer-deposited (ALD) Al2O3 as the gate dielectric are fabricated on the SiSi1xGex heterostructures. The low-temperature carrier density of a two-dimensional electron system (2DES) in the strained Si quantum well can be controllably tuned from 2.5×1011to4.5×1011cm2, virtually without any gate leakage current. Magnetotransport data show the homogeneous depletion of 2DES under gate biases. The characteristic of vertical modulation using ALD dielectric is shown to be better than that using Schottky barrier or the SiO2 dielectric formed by plasma-enhanced chemical-vapor-deposition.

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