The effect of intrasubband interface roughness scattering on intersubband transition linewidths in double-quantum-well and quantum-cascade (QC) structures is studied. In -GaInAs∕AlInAs structures, the calculated ratios between the linewidths of the spatially vertical and diagonal transitions agree with the experimental values. In -Si∕ QC structures, the experimentally observed linewidth is a factor of 4–7 smaller than the predicted value. However, by assuming a vertical interface correlation between adjacent interfaces separated by less than , the theory reproduces the experiment. Transmission electron microscopy of the SiGe QC sample reveals this vertical correlation, supporting the model.
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