Hall devices having an active area of about are fabricated by focused electron-beam-induced deposition. The deposited material consists of cobalt nanoparticles in a carbonaceous matrix. The realized devices have, at room temperature, a current sensitivity of about , a resistance of a few kilo-ohms, and can be biased with a maximum current of about . The room-temperature magnetic field resolution is about at frequencies above .
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© 2005 American Institute of Physics.
2005
American Institute of Physics
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