We analyze the integration of electromagnetically induced transparency in alkali atoms on a semiconductor chip. We propose the use of antiresonant reflecting optical waveguides with hollow cores to realize the necessary waveguiding capability and optical mode areas of a few square micrometers. We derive the scaling laws and limitations for the reduction in group velocity and single-photon phase shifts as a function of waveguide dimension. We show that miniaturization leads to a large enhancement of single-photon cross-phase modulation, despite the presence of additional limitations due to coherence dephasing and waveguide loss.
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