Resistive-type palladium structures for hydrogen sensing remains as a research focus for their simplicity in device construction. We demonstrate that a siloxane self-assembled monolayer placed between a substrate and an evaporated ultrathin Pd film promotes the formation of small Pd nanoclusters and reduces the stiction between the palladium and the substrate. The resulting Pd nanocluster film can detect 2%H2 with a rapid response time of 70ms and is sensitive to 25 ppm hydrogen, detectable by a 2% increase in conductance due to the hydrogen-induced palladium lattice expansion.

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