Lead barium zirconate (PBZ) thin films were deposited on Pt∕Ti∕∕Si substrates by spincoating sol-gel precursor solutions to fabricate films for electrically tunable device applications. Randomly oriented cubic perovskite films with , 0.6, and 0.8 were formed after heat treating at 600 °C–750 °C. The results demonstrated that the film possessed promising tunable dielectric properties as measured at 1 MHz. The film heat treated at 750 °C has a dielectric dissipation factor of 0.007 and a dielectric tunability of 43%. The figure of merit of the film is 61.43, which is comparable with the foremost investigated (BaSr) films.
REFERENCES
1.
K. R.
Carroll
, J. M.
Pond
, D. B.
Chrisey
, J. S.
Horwitz
, and R. E.
Leuchtner
, Appl. Phys. Lett.
62
, 1845
(1993
).2.
B. H.
Park
, E. J.
Peterson
, Q. X.
Jia
, J.
Lee
, X.
Zeng
, W.
Si
, and X. X.
Xi
, Appl. Phys. Lett.
78
, 533
(2001
).3.
S. G.
Lu
, X. H.
Zhu
, C. L.
Mak
, K. H.
Wong
, H. L.
Chan
, and C. L.
Choy
, Appl. Phys. Lett.
82
, 2877
(2003
).4.
M. W.
Cole
, W. D.
Nothwang
, C.
Hubbard
, E.
Ngo
, and M.
Ervin
, J. Appl. Phys.
93
, 9218
(2003
).5.
Y. A.
Jeon
, E. S.
Choi
, T. S.
Seo
, and S. G.
Yoon
, Appl. Phys. Lett.
79
, 1012
(2001
).6.
T. M.
Shaw
, Z.
Suo
, M.
Huang
, E.
Liniger
, R. B.
Laibowitz
, and J. D.
Baniecki
, Appl. Phys. Lett.
75
, 2129
(1999
).7.
T. R.
Taylor
, P.
Hansen
, B.
Acikel
, N.
Pervez
, R. A.
York
, S. K.
Streiffer
, and J. S.
Speck
, Appl. Phys. Lett.
80
, 1978
(2002
).8.
M. W.
Cole
, P. C.
Joshi
, and M. H.
Ervin
, J. Appl. Phys.
89
, 6336
(2001
).9.
K. B.
Chong
, L. B.
Kong
, L.
Chen
, L.
An
, C. Y.
Tan
, C. K.
Ong
, and T.
Osipowicz
, J. Appl. Phys.
95
, 1416
(2004
).10.
Y. A.
Jeon
, T. S.
Seo
, and S. G.
Yoon
, Jpn. J. Appl. Phys., Part 1
, 40
, 6496
(2001
).11.
D. M.
Bubb
, J. S.
Horwitz
, S. B.
Qudri
, S. W.
Kirchoefer
, C.
Hubert
, and J.
Levy
, Appl. Phys. A: Mater. Sci. Process.
79
, 99
(2004
).12.
G.
Lu
, A.
Linsebigler
, and J. T.
Yates
Jr., J. Phys. Chem.
98
, 11733
(1998
).13.
G.
Shirane
, Phys. Rev.
86
, 219
(1952
).14.
G.
Shirane
, and S.
Hoshino
, Acta Crystallogr.
7
, 203
(1954
).15.
16.
B. P.
Pokharel
, and D.
Pandey
, J. Appl. Phys.
88
, 5364
(2000
).17.
J. H.
Tseng
, and T. B.
Wu
, Appl. Phys. Lett.
78
, 1721
(2001
).18.
M.
Adamczyk
, Z.
Ujma
, and J.
Handerek
, J. Appl. Phys.
89
, 542
(2001
).19.
B. P.
Pokharel
, and D.
Pandey
, J. Appl. Phys.
86
, 3327
(1999
).© 2005 American Institute of Physics.
2005
American Institute of Physics
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