$320×256$ solar-blind focal plane arrays based on $AlxGa1−xN$

We report AlGaN-based backilluminated solar-blind ultraviolet focal plane arrays operating at a wavelength of 280 nm. The electrical characteristics of the individual pixels are discussed, and the uniformity of the array is presented. The $p–i–n$ photodiode array was hybridized to a $320×256$ read-out integrated circuit entirely within our university research lab, and a working $320×256$ camera was demonstrated. Several example solar-blind images from the camera are also provided.