Vertically-coupled micro-resonators realized usingthree-dimensional sculpting in silicon

A modified separation by implantation of oxygen process has been developed to sculpt vertically coupled microdisk resonators in silicon. The approach involves the implantation of oxygen ions into a silicon substrate, patterned with thermal oxide, to define waveguides on the bottom silicon layer, and photolithography and reactive ion etching to define the microdisk resonators on the top silicon layer. The top and the bottom silicon layers are separated by the oxide layer that was formed after the oxygen implantation. Fabricated microdisk resonators show resonances with a $Q$ value of 10 300 and a free spectral range of $5.4nm$⁠.