Crystalline 20- to 40-nm-diamGe nanoparticles were precipitated periodically in GeBSiO2 thin glass films fabricated by the plasma-enhanced chemical vapor deposition method. Such a periodic structure was created by exposure to an interference pattern with a KrF excimer laser (248nm wavelength) and successive annealing at 600°C. Nanoparticles were precipitated predominantly in the unirradiated region after photoinduced refractive index change was erased completely after annealing up to 500°C.

1.
D.
Milanese
,
M.
Ferraris
,
Y.
Menke
,
M.
Olivero
,
G.
Perrone
,
C. B. E.
Gawith
,
G.
Brambilla
,
P. G. R.
Smith
, and
E. R.
Taylor
,
Appl. Phys. Lett.
84
,
3259
(
2004
).
2.
K. O.
Hill
,
P. St. J.
Russell
,
G.
Meltz
, and
A. M.
Vengsarkar
,
J. Lightwave Technol.
15
,
1261
(
1997
).
3.
J.
Nishii
,
K.
Fukumi
,
H.
Yamanaka
,
K.
Kawamura
,
H.
Hosono
, and
H.
Kawazoe
,
Phys. Rev. B
52
,
1661
(
1995
).
4.
T.
Erdogan
,
V.
Mizrahi
,
P. J.
Lemaire
, and
D.
Monroe
,
J. Appl. Phys.
76
,
73
(
1994
).
5.
M.
Douay
,
W. X.
Xie
,
T.
Taunay
,
P.
Bernage
,
P.
Niay
,
P.
Cordier
,
B.
Poumellec
,
L.
Dong
,
J. F.
Bayon
,
H.
Poignant
, and
R.
Delevaque
,
J. Lightwave Technol.
15
,
1329
(
1997
).
6.
J.
Nishii
,
K.
Kintaka
,
H.
Nishiyama
,
T.
Sano
,
E.
Ohmura
, and
I.
Miyamoto
,
Appl. Phys. Lett.
81
,
2364
(
2002
).
7.
H.
Nishiyama
,
K.
Kintaka
,
J.
Nishii
,
T.
Sano
,
E.
Ohmura
, and
I.
Miyamoto
,
Jpn. J. Appl. Phys., Part 1
42
,
559
(
2003
).
8.
P. J.
Lemaire
,
R. M.
Atkins
,
V.
Mizrahi
, and
W. A.
Reed
,
Electron. Lett.
29
,
1191
(
1993
).
9.
K.
Awazu
,
K.
Kanehira
,
H.
Imai
, and
H.
Hirashima
,
Nucl. Instrum. Methods Phys. Res. B
141
,
589
(
1998
).
10.
1997 JCPDS-International Centre for Diffraction Data. Powder Diffraction File, Release 1997, Data sets 1–47 (PDF Numbers 04–545).
11.
J.
Qiu
,
M.
Shirai
,
T.
Nakaya
,
J.
Si
,
X.
Jiang
,
C.
Zhu
, and
K.
Hirao
,
Appl. Phys. Lett.
81
,
3040
(
2002
).
12.
Y.
Cheng
,
K.
Sugioka
,
K.
Midorikawa
,
M.
Masuda
,
K.
Toyoda
,
M.
Kawachi
, and
K.
Shihoyama
,
Opt. Lett.
28
,
55
(
2003
).
13.
R. J.
Charles
and
F. E.
Wagstaff
,
J. Am. Ceram. Soc.
51
,
16
(
1968
).
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