We report the realization of a completely controllable high-speed nanomechanical memory element fabricated from single-crystal silicon wafers. This element consists of a doubly clamped suspended nanomechanical beam structure, which can be made to switch controllably between two stable and distinct states at a single frequency in the megahertz range. Because of their submicron size and high normal-mode frequencies, these nanomechanical memory elements offer the potential to rival the current state-of-the-art electronic data storage and processing.
REFERENCES
1.
H. P.
Babbage
, Babbage’s Calculating Engines
, Charles Babbage Institute Reprint Series for the History of Computing, Vol. 2
(Tomash
, Los Angeles, 1982
; originally published in 1889
).2.
3.
4.
5.
T.
Reuckes
, K.
Kim
, E.
Joselevich
, G. Y.
Tseng
, C.-L.
Cheung
, and C. M.
Lieber
, Science
289
, 94
(2000
).6.
L.
Euler
, in Elastic Curves
, translated and annotated by W. A.
Oldfather
, C. A.
Ellis
, and D. M.
Brown
, reprinted from ISIS No. 58 XX(1), 1774 (Saint Catherine
, Bruges, Belgium).7.
M. C.
Cross
and R.
Lifshitz
, Phys. Rev. B
64
, 085324
(2001
).8.
R. H.
Blick
, A.
Erbe
, L.
Pescini
, A.
Kraus
, D. V.
Scheible
, F. W.
Beil
, E.
Hoehberger
, A.
Hoerner
, J.
Kirschbaum
, H.
Lorenz
, and J. P.
Kotthaus
, J. Phys.: Condens. Matter
14
, R905
(2002
).9.
D. S.
Greywall
, B.
Yurke
, P. A.
Busch
, A. N.
Pargellis
, and R. L.
Willett
, Phys. Rev. Lett.
72
2992
(1994
).10.
A. N.
Cleland
and M. L.
Roukes
, Sens. Actuators, A
72
, 256
(1999
).11.
P.
Mohanty
, D. A.
Harrington
, K. L.
Ekinci
, Y. T.
Yang
, M. J.
Murphy
, and M. L.
Roukes
, Phys. Rev. B
66
, 085416
(2002
).12.
A.
Husain
, J.
Hone
, Henk W. Ch.
Postma
, X. M. H.
Huang
, T.
Drake
, M.
Barbic
, A.
Scherer
, and M. L.
Roukes
, Appl. Phys. Lett.
83
, 1240
(2003
).13.
W.
Weaver
, Jr., S. P.
Timoshenko
, and D. H.
Young
, Vibration Problems in Engineering
(Wiley
, New York, 1990
).14.
A. N.
Cleland
, Foundations of Nanomechanics: From Solid State Theory to Device Applications
(Springer
, New York, 2003
).15.
16.
X. M. H.
Huang
, C. A.
Zorman
, M.
Mehregany
, and M. L.
Roukes
, Nature (London)
421
, 496
(2003
).17.
P.
Vettiger
, G.
Cross
, M.
Despont
, U.
Dreschler
, U.
Durig
, B.
Gotsmann
, W.
Haberle
, M. A.
Lantz
, H. E.
Rothuizen
, R.
Stutz
, and G. K.
Binnig
, IEEE Trans. Nanotechnol.
1
, 39
(2002
).18.
19.
K. E.
Drexler
, Nanosystems: Molecular Machinery, Manufacturing and Computation
(Wiley
, New York, 1992
).© 2004 American Institute of Physics.
2004
American Institute of Physics
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