We present a method for microfabricating apertures in a silicon substrate using well-known cleanroom technologies resulting in highly reproducible giga-seal resistance bilayer formations. Using a plasma etcher, apertures have been etched through a silicon wafer. Teflon has been chemically vapor deposited so that the surface resembles bulk Teflon and is hydrophobic. After fabrication, reproducible high resistance bilayers were formed and characteristic measurements of a self-inserted single OmpF porin ion channel protein were made.
Teflon-coated silicon apertures for supported lipid bilayer membranes
S. J. Wilk, M. Goryll, G. M. Laws, S. M. Goodnick, T. J. Thornton, M. Saraniti, J. Tang, R. S. Eisenberg; Teflon-coated silicon apertures for supported lipid bilayer membranes. Appl. Phys. Lett. 11 October 2004; 85 (15): 3307–3309. https://doi.org/10.1063/1.1805712
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