BiFeO3 was studied as an alternative environmentally clean ferro/piezoelectric material. 200-nm-thick BiFeO3 films were grown on Si substrates with SrTiO3 as a template layer and SrRuO3 as bottom electrode. X-ray and transmission electron microscopy studies confirmed the epitaxial growth of the films. The spontaneous polarization of the films was 45μCcm2. Retention measurement up to several days showed no decay of polarization. A piezoelectric coefficient (d33) of 60pmV was observed, which is promising for applications in micro-electro-mechanical systems and actuators.

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