Hall effect measurements have been carried out to determine the carrier density and mobilities in ultrananocrystalline diamond films grown with added nitrogen. The results show clear -type conductivity with very low thermal activation energy. Mobility values of are found for a sheet carrier concentration of . These measurements indicate that ultrananocrystalline films grown with high nitrogen levels in the growth gas mixture can have bulk carrier concentrations of up to , which is very high for diamond films. The -type nature of this material was also confirmed by Seebeck effect measurements.
REFERENCES
1.
M. W.
Geis
and J. C.
Angus
, Sci. Am.
, 64
(1992
).2.
C.
Nebel
, C.
Sauerer
, F.
Ertl
, M.
Stutzmann
, C.
Graeff
, P.
Bergonzo
, O.
Williams
, and R.
Jackman
, Appl. Phys. Lett.
79
, 4541
(2001
).3.
O.
Williams
, M.
Whitfield
, R.
Jackman
, J.
Foord
, B.
JE.
, and C.
Nebel
, Appl. Phys. Lett.
78
, 3460
(2001
).4.
A.
Hokazono
, H.
Kawarada
, T.
Ishikura
, K.
Nakamura
, and S.
Yamashita
, Diamond Relat. Mater.
6
, 339
(1997
).5.
A.
Aleksov
, A.
Denisenko
, U.
Spitzberg
, T.
Jenkins
, W.
Ebert
, and E.
Kohn
, Diamond Relat. Mater.
11
, 382
(2002
).6.
S.
Koizumi
, T.
Teraji
, and H.
Kanda
, Diamond Relat. Mater.
9
, 935
(2000
).7.
S.
Koizumi
, K.
Watanabe
, F.
Hasegawa
, and H.
Kanda
, Science
292
, 1899
(2001
).8.
D. M.
Gruen
, Annu. Rev. Mater. Sci.
29
, 211
(1999
).9.
S.
Bhattacharyya
, O.
Auciello
, J.
Birrell
, J. A.
Carlisle
, L. A.
Curtiss
, A. N.
Goyette
, D. M.
Gruen
, A. R.
Krauss
, J.
Schlueter
, A.
Sumant
, and P.
Zapol
, Appl. Phys. Lett.
79
, 1441
(2001
).10.
11.
O. A.
Williams
and R. B.
Jackman
, Semicond. Sci. Technol.
18
, S34
(2003
).12.
D. K.
Schroder
, Semiconductor Material and Device Characterization
, 2nd ed. (Wiley
, New York, 1998
).13.
C. E.
Nebel
, M.
Rother
, M.
Stutzmann
, C.
Summonte
, and M.
Heintze
, Philos. Mag. Lett.
74
, 455
(1996
).14.
L.
Klibanov
, M.
Oksman
, A.
Seidman
, and N.
Croitoru
, Diamond Relat. Mater.
6
, 1152
(1997
).15.
W.
Mycielski
, E.
Staryga
, A.
Lipinski
, S.
Mitura
, and A.
Sokolowska
, Diamond Relat. Mater.
3
, 858
(1994
).16.
J. P.
Goss
, R.
Jones
, P. R.
Briddon
, G.
Davies
, A. T.
Collins
, A.
Mainwood
, J. A.
van Wyk
, J. M.
Baker
, M. E.
Newton
, A. M.
Stoneham
, and S. C.
Lawson
, Phys. Rev. B
56
, 16031
(1997
).17.
P.
Zapol
, M.
Sternberg
, L. A.
Curtiss
, T.
Frauenheim
, and D. M.
Gruen
, Phys. Rev. B
65
, 045403
(2002
).18.
V. S.
Veerasamy
, J.
Yuan
, G. A. J.
Amaratunga
, W. I.
Milne
, K. W. R.
Gilkes
, M.
Weiler
, and L. M.
Brown
, Phys. Rev. B
48
, 17954
(1993
).19.
J.
Robertson
, Semicond. Sci. Technol.
18
, S12
(2003
).© 2004 American Institute of Physics.
2004
American Institute of Physics
You do not currently have access to this content.