The results of fabrication and performance of an ionization vacuum gauge using a carbon nanotube electron source are presented. The electron source was constructed with multiwall nanotubes, which were grown using thermal chemical vapor deposition. The electron emission of the source was stable in vacuum pressure up to 107Torr, which is better than the metal field emitters. The measurement linearity of the gauge was better than ±10% from 106 to 1010Torr. The gauge sensitivity of 4Torr1 was achieved under 50μA electron emission in nitrogen. The gauge is expected to find applications in vacuum measurements from 107Torr to below 1011Torr.

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