Preparation and optical waveguide property of metal alkoxide solution-derived $Pb(Zr0.5Ti0.5)O3$ thick films Available to Purchase

$Pb(Zr0.5Ti0.5)O3$ films with thickness of about 1.5 and 3.7 μm have been deposited on single-crystal $SrTiO3$ substrate by a sol-gel process from nonhydrolyzed metal alkoxide precursor. X-ray diffraction shows that the films exhibit a single perovskite phase with (001)-preferred orientation. Atomic force microscopy study indicates that the PZT film possesses a crack-free and smooth surface. The optical waveguide property has been examined by the prism-film coupling experiment. Four and 12 TE modes are observed for 1.5 and 3.7 μm PZT films, respectively.