We report on the preparation and characterization of two materials based on cubic NiSi2(CaF2-type, cF12,Fm3̄m) that show no lattice mismatch to Si and are thus promising materials for perfect epitaxial films grown on silicon. The perfectly lattice-matched materials are special compositions within the extended solid solution phases NiSi2−xAlx and NiSi2−xGax with x=0.26 for Al and x=0.17 for Ga, respectively. The variations of bulk lattice parameters with the composition were studied by means of x-ray diffraction and the melting behavior of the solid solution phases was investigated by differential thermal analysis. Both phases are thermally stable up to temperatures around 1000 °C. Phase diagram investigations show that the respective phases are in thermodynamic equilibrium with pure silicon. The electrical conductivity of NiSi2−xAlx and NiSi2−xGax was studied on selected bulk samples between 4.2 and 300 K. Both materials show metallic behavior with specific room-temperature resistivities between 23 and 40 μΩ cm. The difference is mainly due to intrinsic defects in these compounds.

1.
R. T.
Tung
,
J. M.
Poate
,
J. C.
Bean
,
J. M.
Gibson
, and
D. C.
Jacobson
,
Thin Solid Films
93
,
77
(
1982
).
2.
L. J.
Chen
and
J. W.
Mayer
,
Thin Solid Films
93
,
135
(
1982
).
3.
R. T.
Tung
,
J. M.
Gibson
, and
J. M.
Poate
,
Phys. Rev. Lett.
50
,
429
(
1983
).
4.
R. T.
Tung
and
F.
Schrey
,
Appl. Phys. Lett.
55
,
256
(
1989
).
5.
J. C.
Hensel
,
A. F. J.
Levi
,
R. T.
Tung
, and
J. M.
Gibson
,
Appl. Phys. Lett.
47
,
151
(
1985
).
6.
J. M.
Gay
,
D.
Mangelinck
,
P.
Stocker
,
B.
Pichaud
, and
P.
Gas
,
Physica B
221
,
90
(
1996
).
7.
D.
Mangelinck
,
P.
Gas
,
J. M.
Gay
,
B.
Pichaud
, and
O.
Thomas
,
J. Appl. Phys.
84
,
2583
(
1998
).
8.
K. Y.
Gao
and
B. X.
Liu
,
Appl. Phys. A: Mater. Sci. Process.
68
,
333
(
1999
).
9.
K. W.
Richter
and
H.
Ipser
,
Intermetallics
11
,
101
(
2003
).
10.
Y.
Du
and
J. C.
Schuster
,
Metall. Trans. A
30A
,
2409
(
1999
).
11.
M.
El-Boragy
,
T.
Rajasekharan
, and
K.
Schubert
,
Z. Metallkd.
73
,
193
(
1982
).
12.
N. F. Mott and H. Jones, The Theory of the Properties of Metals and Alloys (Oxford University Press, London, 1964).
13.
J. C.
Hensel
,
R. T.
Tung
,
J. M.
Poate
, and
F. C.
Unterwald
,
Appl. Phys. Lett.
44
,
913
(
1984
).
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