Fabrication of a highly-sensitive UV detector based on the surface-acoustic-wave (SAW) principle is reported. The output voltage of the SAW oscillator constructed with a ZnO/LiNbO3 hybrid SAW filter was found to decrease linearly with increasing UV light intensity, and a very low intensity UV light of 10 μW/cm2 was detected easily. Our results show its potential use in wireless UV measurement systems.

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