Amorphous (Zr,Y)Ox films were synthesized by reactive magnetron sputtering and subsequently crystallized by oblique ion bombardment. Crystalline texture nucleated by the ion beam was replicated by solid-phase epitaxial growth throughout the formerly amorphous yttria-stabilized zirconia (YSZ) film. The resulting YSZ films have (211) orientation normal to the substrate with in-plane directions (111), parallel, and (110), transverse, to the azimuth of the ion beam. We hypothesize that the texture mechanism involves ion-induced film compression and shear. The results, taken together with prior work, show that oblique ion texturing of amorphous films is a general phenomenon that can be used to fabricate substrates with more than one type of crystallographic orientation.

1.
G. H.
Gilmer
,
H.
Huang
, and
C.
Roland
,
Computational Mat. Sci.
12
,
354
(
1998
).
2.
Y.
Iijima
,
N.
Tanabe
,
O.
Kohno
, and
Y.
Ikeno
,
Appl. Phys. Lett.
60
,
769
(
1992
).
3.
R. P.
Reade
,
P.
Berdahl
,
S. M.
Garrison
, and
R. E.
Russo
,
Appl. Phys. Lett.
61
,
2231
(
1992
).
4.
C. P.
Wang
,
K. B.
Do
,
M. R.
Beasley
,
T. H.
Geballe
, and
R. H.
Hammond
,
Appl. Phys. Lett.
71
,
2955
(
1997
).
5.
J. O.
Willis
,
P. N.
Arendt
,
S. R.
Foltyn
,
Q. X.
Jia
,
J. R.
Groves
,
R. F.
DePaula
,
P. C.
Dowden
,
E. J.
Peterson
,
T. G.
Holesinger
,
J. Y.
Coulter
,
M.
Ma
,
M. P.
Maley
, and
D. E.
Peterson
,
Physica C
335
,
73
(
2000
).
6.
T.
Mizutani
,
J. Non-Cryst. Solids
181
,
123
(
1995
).
7.
Ch. B.
Lioutas
,
N.
Vouroutzis
,
S.
Logothetidis
, and
S.
Boultadakis
,
Carbon
36
,
545
(
1998
).
8.
K.
Pangal
,
J. C.
Sturm
,
S.
Wagner
, and
T. H.
Buyuklimanli
,
J. Appl. Phys.
85
,
1900
(
1999
).
9.
R. P.
Reade
,
P.
Berdahl
, and
R. E.
Russo
,
Appl. Phys. Lett.
80
,
1352
(
2002
).
10.
P. Berdahl, J. Liu, R. P. Reade, and R. E. Russo, in Proceedings of the Annual Meeting of the American Ceramic Society, St. Louis, May 2002 (in press).
11.
A.
Godfrey
,
D. J.
Jensen
, and
N.
Hansen
,
Acta Mater.
46
,
835
(
1998
).
12.
F. J. Humphreys and M. Hatherly, Recrystallization and Related Annealing Phenomena (Elsevier, Oxford, 1995), Sec. 2.4.
13.
D. L.
Wood
,
K.
Nassau
, and
T. Y.
Kometani
,
Appl. Opt.
29
,
2485
(
1990
).
14.
S.
Ramanathan
,
D. A.
Muller
,
G. D.
Wilk
,
C. M.
Park
, and
P. C.
McIntryre
,
Appl. Phys. Lett.
79
,
3311
(
2001
).
15.
P. S.
Manning
,
J. D.
Sirman
,
R. A. De
Souza
, and
J. A.
Kilner
,
Solid State Ionics
100
,
1
(
1997
).
16.
D.
Dobrev
,
Thin Solid Films
92
,
41
(
1982
).
17.
R. M.
Bradley
,
J. M. E.
Harper
, and
D. A.
Smith
,
J. Appl. Phys.
60
,
4160
(
1986
).
18.
L.
Dong
and
D. J.
Srolovitz
,
Appl. Phys. Lett.
75
,
584
(
1999
).
19.
R.
Tarumi
,
A.
Ogura
,
M.
Shimojo
,
K.
Takashima
, and
Y.
Higo
,
Jpn. J. Appl. Phys.
39
,
L611
(
2000
).
20.
A.
Ogura
,
R.
Tarumi
,
M.
Shimojo
,
K.
Takashima
, and
Y.
Higo
,
Appl. Phys. Lett.
79
,
1042
(
2001
).
21.
J.
Friedrich
,
U.
Herr
, and
K.
Samwer
,
Phys. Status Solidi A
189
,
897
(
2002
).
22.
B.
Ma
,
M.
Li
,
Y. A.
Jee
,
R. E.
Koritala
,
B. L.
Fisher
, and
U.
Balachandran
,
Physica C
366
,
270
(
2002
).
23.
D.
Youm
and
J. H.
Kim
,
Physica C
275
,
273
(
1997
).
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