Metal-oxide-semiconductor (MOS) capacitors with Si nanocrystals (Si-nc) obtained by ion implantation in have been studied for nonvolatile memory applications. The use of a thermal oxide and the accurate tuning of the postimplantation processing conditions allow good integrity, reliability, and high retention times. We propose an additional thermal oxidation step after the formation of the Si-nc. This process has enabled growing a thin tunnel oxide at the interface completely free of Si-nc and Si excess, leading to a formidable increase of the retention time. In addition the additional oxidation makes it possible to control the size and density of Si-nc. Finally, we show its impact on the memory characteristics of the nanocrystal device (writing speed and programming window).
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30 June 2003
Research Article|
June 30 2003
The effect of additional oxidation on the memory characteristics of metal-oxide-semiconductor capacitors with Si nanocrystals
B. Garrido;
B. Garrido
EME, Departament d’Electrònica, Universitat de Barcelona, Carrer Marti i Franques, 1, 08028 Barcelona, Spain
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S. Cheylan;
S. Cheylan
EME, Departament d’Electrònica, Universitat de Barcelona, Carrer Marti i Franques, 1, 08028 Barcelona, Spain
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O. González-Varona;
O. González-Varona
EME, Departament d’Electrònica, Universitat de Barcelona, Carrer Marti i Franques, 1, 08028 Barcelona, Spain
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A. Pérez-Rodrı́guez;
A. Pérez-Rodrı́guez
EME, Departament d’Electrònica, Universitat de Barcelona, Carrer Marti i Franques, 1, 08028 Barcelona, Spain
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J. R. Morante
J. R. Morante
EME, Departament d’Electrònica, Universitat de Barcelona, Carrer Marti i Franques, 1, 08028 Barcelona, Spain
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Appl. Phys. Lett. 82, 4818–4820 (2003)
Article history
Received:
February 24 2003
Accepted:
April 28 2003
Citation
B. Garrido, S. Cheylan, O. González-Varona, A. Pérez-Rodrı́guez, J. R. Morante; The effect of additional oxidation on the memory characteristics of metal-oxide-semiconductor capacitors with Si nanocrystals. Appl. Phys. Lett. 30 June 2003; 82 (26): 4818–4820. https://doi.org/10.1063/1.1587273
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