We have investigated a series of samples containing SiGe islands capped at different growth temperatures. A layer of islands formed by deposition of 5 ML of pure Ge was capped with Si, deposited at temperatures of 460, 540, and 630 °C, respectively. The Ge composition profile and the shape of the buried islands are deduced from x-ray diffraction data. While for capping at high substrate temperatures a significant dilution of the Ge content and a flattening of the islands occur, capping at low temperatures maintains a high aspect ratio and a high Ge content of the islands. The maximum in-plane strain in the island remains as high as 0.005 for capping at low temperatures.

1.
O. G.
Schmidt
,
U.
Denker
,
S.
Christiansen
, and
F.
Ernst
,
Appl. Phys. Lett.
81
,
2614
(
2002
).
2.
G.
Capellini
,
M.
De Seta
, and
F.
Evangelisti
,
Appl. Phys. Lett.
78
,
303
(
2001
).
3.
P.
Sutter
and
M. G.
Lagally
,
Phys. Rev. Lett.
81
,
3471
(
1998
).
4.
O. G.
Schmidt
,
U.
Denker
,
K.
Eberl
,
O.
Kienzle
, and
F.
Ernst
,
Appl. Phys. Lett.
77
,
2509
(
2000
).
5.
G.
Patriarche
,
I.
Sagnes
,
P.
Boucaud
,
V.
LeThanh
,
D.
Bouchier
,
C.
Hernandez
,
Y.
Campidelli
, and
D.
Bensahel
,
Appl. Phys. Lett.
77
,
370
(
2000
).
6.
A.
Rastelli
,
E.
Müller
, and
H.
von Känel
,
Appl. Phys. Lett.
80
,
1438
(
2002
).
7.
M.
Rauscher
,
R.
Paniago
,
T. H.
Metzger
,
Z.
Kovats
,
J.
Domke
,
J.
Peisl
,
H. D.
Pfannes
,
J.
Schulze
, and
I.
Eisele
,
J. Appl. Phys.
86
,
6763
(
1999
).
8.
For a recent review see, e.g.,
M.
Schmidbauer
,
M.
Hanke
, and
R.
Köhler
,
Cryst. Res. Technol.
37
,
3
(
2002
).
9.
M.
Schmidbauer
,
F.
Hatami
,
M.
Hanke
,
P.
Schaefer
,
K.
Braune
,
W. T.
Masselink
,
R.
Köhler
, and
M.
Ramsteiner
,
Phys. Rev. B
65
,
125320
(
2002
).
10.
H.
Okuda
,
S.
Ochiai
,
K.
Ito
, and
Y.
Amemiya
,
Appl. Phys. Lett.
81
,
2358
(
2002
).
11.
J.
Stangl
,
A.
Daniel
,
V.
Holy
,
T.
Roch
,
G.
Bauer
,
I.
Kegel
,
T. H.
Metzger
,
Th.
Wiebach
,
O. G.
Schmidt
, and
K.
Eberl
,
Appl. Phys. Lett.
79
,
1474
(
2001
).
12.
A.
Hesse
,
J.
Stangl
,
V.
Holy
,
T.
Roch
,
G.
Bauer
,
O. G.
Schmidt
,
U.
Denker
, and
B.
Struth
,
Phys. Rev. B
66
,
085321
(
2002
).
13.
T.
Roch
,
V.
Holy
,
A.
Hesse
,
J.
Stangl
,
T.
Fromherz
,
G.
Bauer
,
T. H.
Metzger
, and
S.
Ferrer
,
Phys. Rev. B
65
,
245324
(
2002
).
This content is only available via PDF.
You do not currently have access to this content.