Strain relaxation during the layer by layer growth of cubic CdSe onto ZnSe

A detailed reflection high-energy electron diffraction analysis shows relevant features of the lattice parameter relaxation of CdSe thin films grown in a layer-by-layer mode onto ZnSe. In situ investigations of different azimuths show a clear lattice parameter oscillation in the [110] azimuth. The lattice parameter has a minimum value (similar to that of ZnSe) during Se exposure steps, and a higher and increasing lattice parameter during Cd exposure steps. The behavior is ascribed to the formation of CdSe islands during Cd exposure steps. The cumulative effect in CdSe exposure steps is considered to be a consequence of a decrease in the island size with the number of cycles. Actual plastic deformation does occur after 5 ML.