We present a cross-sectional scanning-tunneling microscopy investigation of the shape, size, and composition of InAs quantum dots in a GaAs matrix, grown by molecular beam epitaxy at low growth rate. From the dimensional analysis we conclude that the investigated quantum dots have an average height of 5 nm, a square base of 18 nm oriented along [010] and [100] and the shape of a truncated pyramid. From outward relaxation and lattice constant profiles we conclude that the dots consist of an InGaAs alloy and that the indium concentration increases linearly in the growth direction. Our results justify the predictions obtained from previous photocurrent measurements on similar structures and the used theoretical model.

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