We have employed the photoluminescence and x-ray photoelectron spectroscopy measurements to study the effects of treatment on the p-type GaN After treatment, we found that the reduction of the surface state, related to nitrogen-vacancy defects on the p-GaN surface, led to a reduction in surface band bending by 0.25 eV. The surface band bending reduction and surface state reduction caused by the surface treatment could be useful for the formation of ohmic and Schottky contacts between the metal and p-GaN layers. In addition, the intensity of the 2.8-eV photoluminescence band depended on the amount of nitrogen vacancy of p-GaN, which was also investigated in this study.
REFERENCES
1.
H. Morkoç, Nitride Semiconductors and Devices (Springer, Berlin, 1999).
2.
S. Nakamura and S. F. Chichibu, Introduction to Nitride Semiconductor Blue Lasers and Light Emitting Diodes (Taylor & Francis, London, 2000).
3.
A. Hiraki, Metal-Semiconductor Interfaces (Ohmsha, Tokyo, 1995).
4.
L. A.
Farrow
, C. J.
Sandroff
, and M. C.
Tamargo
, Appl. Phys. Lett.
51
, 1931
(1987
).5.
6.
Y.
Fukuda
, M.
Shimomura
, N.
Sanada
, and M.
Nagoshi
, J. Appl. Phys.
76
, 3632
(1994
).7.
J. O.
Song
, S. J.
Park
, and T. Y.
Seong
, Appl. Phys. Lett.
80
, 3129
(2002
).8.
J.
Sun
, K. A.
Rickert
, J. M.
Redwing
, A. B.
Ellis
, F. J.
Himpsel
, and T. F.
Kuech
, Appl. Phys. Lett.
76
, 415
(2000
).9.
T.
Hashizume
, S.
Ootomo
, S.
Oyama
, M.
Konishi
, and H.
Hasegawa
, J. Vac. Sci. Technol. B
19
, 1675
(2001
).10.
Y. J.
Lin
, C. D.
Tsai
, Y. T.
Lyu
, and C. T.
Lee
, Appl. Phys. Lett.
77
, 687
(2000
).11.
S. M.
Jeong
, H. W.
Shim
, H. S.
Yoon
, M. G.
Cheong
, R. J.
Choi
, E.-K.
Suh
, and H. J.
Lee
, J. Appl. Phys.
91
, 9711
(2002
).12.
U.
Kaufmann
, M.
Kunzer
, M.
Maier
, H.
Obloh
, A.
Ramakrishnan
, B.
Santic
, and P.
Schlotter
, Appl. Phys. Lett.
72
, 1326
(1998
).13.
C. T.
Lee
, Y. J.
Lin
, and C. H.
Lin
, J. Appl. Phys.
92
, 3825
(2002
).
This content is only available via PDF.
© 2002 American Institute of Physics.
2002
American Institute of Physics
You do not currently have access to this content.